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1. (WO2017039360) TARGET MATERIAL COATING TIP FOR LOW TEMPERATURE ATMOSPHERIC PRESSURE PLASMA APPARATUS

Pub. No.:    WO/2017/039360    International Application No.:    PCT/KR2016/009803
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Fri Sep 02 01:59:59 CEST 2016
IPC: H01J 37/32
H05H 1/24
H05H 1/34
Applicants: PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION
부산대학교 산학협력단
Inventors: KIM, Gyoocheon
김규천
LEE, Haejune
이해준
HONG, Jinwoo
홍진우
Title: TARGET MATERIAL COATING TIP FOR LOW TEMPERATURE ATMOSPHERIC PRESSURE PLASMA APPARATUS
Abstract:
The present invention relates to a target material coating tip of a low temperature atmospheric pressure plasma apparatus in which an optimal material suitable for the intended use is applied to a tip from which plasma is generated so that materials are separated and activated by various radicals and high-energy electrons. The target material coating tip of a low temperature atmospheric pressure plasma apparatus comprises: a plasma generation module for generating plasma; a module expansion structure, extending from the plasma generation module, in which a plasma generation tip is disposed and which contains a target material applied to the plasma generation tip when the plasma is generated; and a plasma generating tip which is connected to the plasma generation module and is located inside the module expansion structure and is coated with a material which is separated and activated by radicals and high-energy electrons of the plasma when the plasma is generated.