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1. (WO2017039246) POLYSILICON PREPARATION APPARATUS

Pub. No.:    WO/2017/039246    International Application No.:    PCT/KR2016/009541
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Sat Aug 27 01:59:59 CEST 2016
IPC: B01J 19/08
C23C 16/24
Applicants: HANWHA CHEMICAL CORPORATION
한화케미칼 주식회사
Inventors: PARK, Sung Eun
박성은
LEE, Hee Dong
이희동
KIM, Jiwoong
김지웅
Title: POLYSILICON PREPARATION APPARATUS
Abstract:
A polysilicon preparation apparatus according to one embodiment of the present invention comprises: a reactor disposed on a base and forming a reaction chamber; one pair of electrode terminals provided at the base and extended inside the reaction chamber; rod filaments provided at the electrode terminals inside the reaction chamber, and connected to each other at the upper ends thereof by a rod bridge, so as to form a silicon rod of polysilicon by the chemical vapor deposition of a raw gas; and a cooling and spraying nozzle for spraying a cooling gas at the silicon rod formed from silicon deposited around the rod bridge and the rod filaments.