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1. (WO2017039184) ADHESIVE REMOVING DEVICE AND METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2017/039184 International Application No.: PCT/KR2016/009002
Publication Date: 09.03.2017 International Filing Date: 17.08.2016
IPC:
G03F 1/68 (2012.01) ,G03F 1/66 (2012.01) ,B08B 7/00 (2006.01)
[IPC code unknown for G03F 1/68][IPC code unknown for G03F 1/66][IPC code unknown for B08B 7]
Applicants:
(주)이오테크닉스 EO TECHNICS CO.,LTD. [KR/KR]; 경기도 안양시 동안구 동편로 91 91, Dongpyeon-ro Dongan-gu, Anyang-si, Gyeonggi-do 13930, KR
Inventors:
박일현 PARK, Ill Hyun; KR
조대엽 CHO, Dae Yub; KR
김영중 KIM, Young Jung; KR
Agent:
리앤목 특허법인 Y.P.LEE, MOCK & PARTNERS; 서울시 강남구 언주로 30길 13 대림아크로텔 12층 12F Daelim Acrotel, 13 Eonju-ro 30-gil Gangnam-gu, Seoul 06292, KR
Priority Data:
10-2015-012560404.09.2015KR
10-2016-010375816.08.2016KR
Title (EN) ADHESIVE REMOVING DEVICE AND METHOD
(FR) DISPOSITIF ET PROCÉDÉ DE RETRAIT D'ADHÉSIF
(KO) 접착제 제거장치 및 방법
Abstract:
(EN) A device for removing an adhesive for adhering a mask and a pellicle from the mask is disclosed. The disclosed adhesive removing device comprises: a laser emitting unit for emitting a laser beam at an adhesive layer formed between the mask and the pellicle; a control unit for controlling the wavelength, waveform, and energy density of the laser beam so as to remove the adhesive layer by the emission of the laser beam; and a photographing unit for monitoring a region at which the laser beam is emitted.
(FR) L'invention concerne un dispositif permettant de retirer d'un masque un adhésif destiné à faire adhérer le masque et une pellicule. Le dispositif de retrait d'adhésif selon l'invention comprend : une unité d'émission laser permettant d'émettre un faisceau laser au niveau d'une couche adhésive formée entre le masque et la pellicule ; une unité de commande permettant de commander la longueur d'onde, la forme d'onde et la densité énergétique du faisceau laser de manière à retirer la couche adhésive par l'émission du faisceau laser ; et une unité de photographie permettant de surveiller une région sur laquelle le faisceau laser est émis.
(KO) 마스크와 펠리클을 접착시키는 접착제를 상기 마스크로부터 제거하는 장치가 개시된다. 개시된 접착제 제거장치는, 상기 마스크와 상기 펠리클 사이에 형성된 접착제 층에 레이저 빔을 조사하는 레이저 조사부; 상기 레이저 빔의 조사에 의해 상기 접착제 층이 제거하도록, 상기 레이저 빔의 파장, 파형 및 에너지 밀도를 제어하는 제어부; 및 상기 레이저 빔이 조사되는 영역을 모니터링 하는 촬영부;를 포함한다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)