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|1. (WO2017039171) LASER PROCESSING DEVICE AND LASER PROCESSING METHOD|
|Applicants:||EO TECHNICS CO.,LTD.
|Inventors:||LEE, Dong Jun
HYUN, Dong Won
KIM, Byung Oh
|Title:||LASER PROCESSING DEVICE AND LASER PROCESSING METHOD|
Disclosed are a laser processing device and a laser processing method. The disclosed laser processing device comprises: a measuring device which measures a change in the height of a subject to be processed, and comprises a first light source, a first light focusing unit, a light sensing unit and a calculation unit, the first light source emitting a probe light for measurement, the first light focusing unit focusing the probe light and irradiating same on the subject to be processed, the light sensing unit comprising a Shack-Hartmann sensor and detecting a change in a reflected light which is the probe light being reflected from a reflective surface of the subject to be processed, and the calculation unit calculating a change in the height of the subject to be processed by using the change in the reflected light detected by the light sensing unit; a second light source which emits, on the subject to be processed, a laser light for processing; and a focus adjusting device which adjusts the focus of the laser light irradiated on the subject to be processed by using the change in the height of the subject to be processed measured by the measuring device.