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1. (WO2017039170) DEVICE AND METHOD FOR MEASURING CHANGE IN THICKNESS OR HEIGHT OF OBJECT

Pub. No.:    WO/2017/039170    International Application No.:    PCT/KR2016/008839
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Fri Aug 12 01:59:59 CEST 2016
IPC: G01B 11/06
G01B 11/24
Applicants: EO TECHNICS CO.,LTD.
(주)이오테크닉스
Inventors: LEE, Dong Jun
이동준
HYUN, Dong Won
현동원
KIM, Byung Oh
김병오
Title: DEVICE AND METHOD FOR MEASURING CHANGE IN THICKNESS OR HEIGHT OF OBJECT
Abstract:
Disclosed are a device and a method for measuring a change in the thickness or the height of an object, the device being provided on the upper part of the object. The disclosed measuring device comprises: a light source which emits a probe light; a light focusing unit which focuses the probe light and irradiates same on an object; a light sensing unit which comprises a Shack-Hartmann sensor and detects a change in a reflected light coming from a reflective surface of the object; and a calculation unit which calculates a change in the height of the reflective surface by using the change in the reflected light detected by the light sensing unit.