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1. (WO2017039169) LASER PROCESSING DEVICE AND LASER PROCESSING METHOD USING SAME

Pub. No.:    WO/2017/039169    International Application No.:    PCT/KR2016/008775
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Thu Aug 11 01:59:59 CEST 2016
IPC: B23K 26/08
B23K 26/044
B23K 26/06
B23K 26/364
B23K 26/382
Applicants: EO TECHNICS CO.,LTD.
(주)이오테크닉스
Inventors: LEE, Byoung Hark
이병학
SHO, Jae Hyok
소재혁
KIM, Seok Gyu
김석규
LEE, Tae Kyung
이태경
Title: LASER PROCESSING DEVICE AND LASER PROCESSING METHOD USING SAME
Abstract:
Disclosed are a laser processing device and a laser processing method using the same. The disclosed processing device for processing an object to be processed, which is loaded on a stage, using a laser, comprises: a laser light source; a first scanner which is driven to rotate a laser beam emitted from the laser light source; a second scanner which is driven to move the laser beam emitted from the first scanner to a predetermined position of the object to be processed; and a scanner control unit for controlling the driving of the first scanner and the second scanner.