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1. (WO2017039129) METHOD FOR MANUFACTURING TRANSPARENT ELECTRODE HAVING WIRING ELECTRODE

Pub. No.:    WO/2017/039129    International Application No.:    PCT/KR2016/006519
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Tue Jun 21 01:59:59 CEST 2016
IPC: G06F 3/041
Applicants: KOREA ELECTROTECHNOLOGY RESEARCH INSTITUTE
한국전기연구원
Inventors: CHUNG, Sung-il
정성일
KIM, Pan-kyeom
김판겸
KWON, Young-woo
권영우
Title: METHOD FOR MANUFACTURING TRANSPARENT ELECTRODE HAVING WIRING ELECTRODE
Abstract:
The present invention relates to a method for manufacturing a transparent electrode having a wiring electrode and, more specifically, to a method for manufacturing a transparent electrode having a wiring electrode, the method implementing, in a one-time process, both a block wiring electrode, in which one or more wiring electrodes to be activated as electrodes are electrically coupled, and a sensor electrode to be activated as an electrode, thereby enabling both a filling characteristic of an electrode material and an alignment work characteristic of the wiring electrode and the sensor electrode to be satisfied. The subject matter of the present invention is a method for manufacturing a transparent electrode having a wiring electrode, comprising: a phase shift mask preparation step of preparing a first phase shift mask and a second phase shift mask having a pattern implemented in an orthogonal direction to the first phase shift mask; a one-directional pattern forming step of forming a one-directional pattern metal sample having a one-directionally formed pattern, by coating an upper part of a substrate with a photosensitizer, placing the first phase shift mask thereon, and then performing light-exposure and plating; a mesh pattern forming step of forming a mesh pattern metal sample having a mesh pattern, by coating an upper part of the one-directional pattern metal sample with the photosensitizer, placing the second phase shift mask thereon, and then performing light-exposure and plating, the mesh pattern consisting of a sensor pattern region having a sensor pattern of a relatively wide pitch and a wiring pattern region having a wiring pattern of a relatively narrow pitch; and an electrode forming step of forming a block wiring electrode, in which one or more wiring electrodes to be activated as electrodes are electrically coupled, from the wiring pattern region and a sensor electrode to be activated as an electrode from the sensor pattern region, by using the mesh pattern metal sample.