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1. (WO2017039056) GRAPHITE FILAMENT SOLAR CELL, DIRECT-HEATING TYPE PLASMA TREATMENT APPARATUS FOR MANUFACTURING SAME, MANUFACTURING SYSTEM, AND MANUFACTURING METHOD USING SAME

Pub. No.:    WO/2017/039056    International Application No.:    PCT/KR2015/010200
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Sat Sep 26 01:59:59 CEST 2015
IPC: H01L 31/18
H01L 31/0392
H01L 31/04
Applicants: NEW POWER PLASMA CO.,LTD.
주식회사 뉴파워 프라즈마
Inventors: CHOI, Dae-kyu
최대규
LEE, Dong-won
이동원
LEE, Jeong-bin
이정빈
CHUNG, Jong-woo
정종우
KIM, Yong-soo
김용수
CHOI, Young-jae
최용재
KIM, Hyun-jong
김현종
JANG, Byoung-yeoul
장병열
Title: GRAPHITE FILAMENT SOLAR CELL, DIRECT-HEATING TYPE PLASMA TREATMENT APPARATUS FOR MANUFACTURING SAME, MANUFACTURING SYSTEM, AND MANUFACTURING METHOD USING SAME
Abstract:
The present invention relates to: a graphite filament solar cell; a direct-heating type plasma treatment apparatus for manufacturing the same; a manufacturing system; and a manufacturing method using the same. The system for manufacturing a graphite filament solar cell, of the present invention, comprises: an arrangement module for arranging at least one graphite filament; a direct-heating plasma treatment module for direct-heat treating the graphite filament in order to form first and second semiconductor layers on the surface of the graphite filament; an antireflective film formation module for forming an antireflective film on the directly heated graphite filament; and a second metal formation module for forming a second metal layer on the graphite film having the antireflective film formed thereon. The system for manufacturing a graphite filament solar cell by using the direct-heating type plasma treatment apparatus, of the present invention, allows, by generating plasma while directly heating a product to be treated, silicon to be stably and rapidly deposited on the surface of the product to be treated. In addition, since manufacturing is simple while manufacturing costs are saved, by directly heating a carbon fiber or a graphite filament and depositing silicon, a solar cell using a carbon fiber or a graphite filament can be produced. Furthermore, a solar cell capable of being used even at extreme temperatures is provided by using a heat resistant graphite filament.