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1. (WO2017038903) SURFACE-SHAPE MEASURING DEVICE AND SURFACE-SHAPE MEASURING PROGRAM

Pub. No.:    WO/2017/038903    International Application No.:    PCT/JP2016/075576
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Thu Sep 01 01:59:59 CEST 2016
IPC: G01B 21/20
G01B 11/24
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: MIYAWAKI Takashi
宮脇 崇
Title: SURFACE-SHAPE MEASURING DEVICE AND SURFACE-SHAPE MEASURING PROGRAM
Abstract:
When known surface-shape data is used to more precisely measure the surface shape of an object to be measured, highly accurate measurement results cannot be obtained if there is an error in the installation of said object on a stage. A surface-shape measuring device that is provided with: a stage that supports an object to be measured; a measuring apparatus that measures the surface shape of the object to be measured in a non-contact manner; a computation part that, on the basis of an output value from the measuring apparatus and of predetermined basic shape data for the object to be measured, computes surface-shape data for the object to be measured; and a calculation unit that, on the basis of the surface-shape data, of the basic shape data, and of information on a target installation position on the stage for the object to be measured, calculates the installation error between the target installation position and the actual installation position on the stage of the object to be measured. The computation unit uses the installation error to update the surface-shape data for the object to be measured.