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1. (WO2017038902) SURFACE-SHAPE MEASURING DEVICE

Pub. No.:    WO/2017/038902    International Application No.:    PCT/JP2016/075575
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Thu Sep 01 01:59:59 CEST 2016
IPC: G01B 11/24
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: MIYAWAKI Takashi
宮脇 崇
Title: SURFACE-SHAPE MEASURING DEVICE
Abstract:
When the surface shape of an object to be measured is to be measured with precision, it is desirable that a head that is provided with a sensor for measuring be afforded substantial freedom of movement. Generally, however, the head is weighted down by a drive system, complex control is necessary, and, as a result, measurement speed is slowed. A surface-shape measuring device that is provided with: a measurement unit that has a radiation part that radiates radiated light at an object to be measured and a light detecting part that detects return light of the radiated light; a drive part that, on the basis of predetermined basic shape data for the object to be measured, moves the measurement unit to a measurement position that faces the object to be measured; and a calculation part that calculates surface-shape data for the object to be measured on the basis of the basic shape of the object to be measured, which is indicated by the basic shape data, and of a slope in relation to the basic shape, said slope being obtained on the basis of detection results from the light detecting part at the measurement position.