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1. (WO2017038788) ARTICLE-HOLDING DEVICE, EXPOSURE DEVICE, METHOD FOR MANUFACTURING FLAT PANEL DISPLAY, METHOD FOR MANUFACTURING DEVICE, METHOD FOR HOLDING ARTICLE, AND EXPOSURE METHOD

Pub. No.:    WO/2017/038788    International Application No.:    PCT/JP2016/075258
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Wed Aug 31 01:59:59 CEST 2016
IPC: G03F 7/20
G02F 1/13
H01L 21/683
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: HATTA, Sumio
八田 澄夫
SHIRASAWA, Masahiro
白澤 正裕
KIMINAMI, Takayuki
木南 貴之
IGARASHI, Yoshito
五十嵐 淑人
Title: ARTICLE-HOLDING DEVICE, EXPOSURE DEVICE, METHOD FOR MANUFACTURING FLAT PANEL DISPLAY, METHOD FOR MANUFACTURING DEVICE, METHOD FOR HOLDING ARTICLE, AND EXPOSURE METHOD
Abstract:
A mask stage device (14) for holding a mask (M) is provided with: a support block (50) for supporting the mask (M) from below; a suction pad (46) that is supported by the support block (50), the suction pad (46) having a holding surface for holding the surface of the mask (M), which is bent by the weight of the mask (M) itself, the suction pad (46) moving the holding surface so as to follow the surface of the bent mask (M), and holding the mask; and a suction port (46b) for suctioning the bent mask (M) to the holding surface.