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|1. (WO2017038490) GAS INJECTION DEVICE|
|Applicants:||SINFONIA TECHNOLOGY CO., LTD.
|Title:||GAS INJECTION DEVICE|
In order to provide a gas injection device that prevents atmospheric air from penetrating, when gas is being filled into an FOUP, the present invention comprises: a nozzle main body 71 having a gas supply port 72 that supplies inert gas and a gas flow path 77 that connects to the gas supply port 72; an opening/closing mechanism 92 that closes the gas supply port 72; and an opening means 96 that opens the gas supply port 72 that has been closed by the opening/closing mechanism 92.