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1. (WO2017038490) GAS INJECTION DEVICE

Pub. No.:    WO/2017/038490    International Application No.:    PCT/JP2016/074188
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Sat Aug 20 01:59:59 CEST 2016
IPC: H01L 21/677
Applicants: SINFONIA TECHNOLOGY CO., LTD.
シンフォニアテクノロジー株式会社
Inventors: KAWAI, Toshihiro
河合 俊宏
TANIYAMA, Yasushi
谷山 育志
KOMIYA, Munekazu
小宮 宗一
SHIGETA, Takashi
重田 貴司
Title: GAS INJECTION DEVICE
Abstract:
In order to provide a gas injection device that prevents atmospheric air from penetrating, when gas is being filled into an FOUP, the present invention comprises: a nozzle main body 71 having a gas supply port 72 that supplies inert gas and a gas flow path 77 that connects to the gas supply port 72; an opening/closing mechanism 92 that closes the gas supply port 72; and an opening means 96 that opens the gas supply port 72 that has been closed by the opening/closing mechanism 92.