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1. (WO2017038470) SHEET DETACHMENT DEVICE AND DETACHMENT METHOD

Pub. No.:    WO/2017/038470    International Application No.:    PCT/JP2016/074016
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Thu Aug 18 01:59:59 CEST 2016
IPC: H01L 21/683
H01L 21/02
Applicants: LINTEC CORPORATION
リンテック株式会社
Inventors: TAKANO Takeshi
高野 健
Title: SHEET DETACHMENT DEVICE AND DETACHMENT METHOD
Abstract:
A sheet detachment device (10) equipped with: an adhering means (20) for adhering a detachable tape PT to an adhesive sheet (AS); a pulling means (30) for detaching the adhesive sheet (AS) from an adherend (WF) by imparting tension to the detachable tape (PT) adhered to the adhesive sheet (AS); a movement restriction means (40) for restricting movement of the adherend (WF) in the adhesive-sheet (AS) detachment direction caused by the detachment of the adhesive sheet (AS) by the pulling means (30); and a pressing means (50) for pressing in the direction of the adherend (WF) on the adhesive sheet (AS) which has been detached from the adherend (WF). Therein, one adhesive sheet (AS) is detached by selectively using the movement restriction means (40) and the pressing means (50).