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1. (WO2017038468) SHEET DETACHMENT DEVICE AND DETACHMENT METHOD

Pub. No.:    WO/2017/038468    International Application No.:    PCT/JP2016/074006
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Thu Aug 18 01:59:59 CEST 2016
IPC: H01L 21/683
Applicants: LINTEC CORPORATION
リンテック株式会社
Inventors: TAKANO Takeshi
高野 健
Title: SHEET DETACHMENT DEVICE AND DETACHMENT METHOD
Abstract:
A sheet detachment device (10) equipped with an adhering means (20) for adhering a detachable tape (PT) to an adhesive sheet (AS), a pulling means (30) for detaching the adhesive sheet (AS) from an adherend (WF) by imparting tension to the detachable tape (PT) adhered to the adhesive sheet (AS), and a folding means (80) for folding the adhesive sheet (AS) that was detached by the pulling means (30), wherein: the pulling means (30) is equipped with a guidance means (32) for guiding the adhesive sheet (AS) in a manner such that the adhesive sheet (AS), which has been detached from the adherend (WF), folds in half; and the folding means (80) is equipped with a crimping means (82) for imparting a crimping force onto the adhesive sheet (AS) which has been folded in half by the guidance means (32).