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1. (WO2017038466) WORKPIECE HOLDING BODY AND FILM FORMING APPARATUS

Pub. No.:    WO/2017/038466    International Application No.:    PCT/JP2016/073974
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Thu Aug 18 01:59:59 CEST 2016
IPC: C23C 14/50
H01L 21/683
Applicants: ULVAC, INC.
株式会社アルバック
Inventors: NAKAMUTA, Yuu
中牟田 雄
MATSUMOTO, Masahiro
松本 昌弘
HARADA, Manabu
原田 学
TAKAHASHI, Koji
高橋 康司
KAGEYAMA, Takashi
影山 貴志
Title: WORKPIECE HOLDING BODY AND FILM FORMING APPARATUS
Abstract:
A workpiece holding body 20 for surface processing according to one embodiment of the present invention is provided with a holder 21 and an adhesive sheet 22. The adhesive sheet 22 has: a first surface 22a (a first adhesive layer 221) that is bonded to the holder 21 with a first adhesive force; and a second surface 22b (a second adhesive layer 222) that is configured to be capable of holding a workpiece (a component main body 110) with a second adhesive force that is higher than the first adhesive force.