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1. (WO2017038410) MICROCHANNEL PLATE AND ELECTRON MULTIPLIER

Pub. No.:    WO/2017/038410    International Application No.:    PCT/JP2016/073490
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Wed Aug 10 01:59:59 CEST 2016
IPC: H01J 43/24
H01J 9/12
Applicants: HAMAMATSU PHOTONICS K.K.
浜松ホトニクス株式会社
Inventors: NAGATA Takaaki
永田 貴章
HAMANA Yasumasa
浜名 康全
NISHIMURA Hajime
西村 一
NAKAMURA Kimitsugu
中村 公嗣
Title: MICROCHANNEL PLATE AND ELECTRON MULTIPLIER
Abstract:
This microchannel plate (10) includes: a base body (11) having an input surface (11a) and an output surface (11b); a plurality of channels (12) passing through from the input surface to the output surface of the base body; an electron emission film (14) provided on the inner wall surface (12a) of the channels; a protective film (15) provided on the electron emission film; and an input electrode (16) and an output electrode (17) provided on the input surface and the output surface of the base body, respectively. The electron emission film comprises Al2O3, and the protective film comprises SiO2. The electron emission film is thicker than the protective film.