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1. (WO2017038274) PIPE JOINT, FLUID CONTROL EQUIPMENT, FLUID CONTROL DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE, AND PIPE JOINT MANUFACTURING METHOD

Pub. No.:    WO/2017/038274    International Application No.:    PCT/JP2016/070883
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Fri Jul 15 01:59:59 CEST 2016
IPC: F16L 13/02
B23K 9/028
F16L 55/00
H01L 21/3065
B23K 9/035
F16L 55/11
Applicants: FUJIKIN INCORPORATED
株式会社フジキン
Inventors: WATANABE, Kazunari
渡辺 一誠
INADA, Toshiyuki
稲田 敏之
SHINOHARA, Tsutomu
篠原 努
NAKATA, Tomohiro
中田 知宏
Title: PIPE JOINT, FLUID CONTROL EQUIPMENT, FLUID CONTROL DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE, AND PIPE JOINT MANUFACTURING METHOD
Abstract:
Provided is a pipe joint comprising: a first member 2; a second member 10; a weld part 8 that joins a first outer peripheral end 14a and a second outer peripheral end 10b while maintaining contact between the first outer peripheral end 14a and the second outer peripheral end 10b over the entire circumferences thereof and causing lateral contraction; an annular seal part 42 that is formed by a first pressing part 22 and a second pressing part 28 moving in directions approaching each other due to the lateral contraction; a heat transmission suppression member 16 that is disposed in a space 26 between the weld part and the seal part 42 in the first and second members 2 and 10, and that suppresses the transmission of welding heat from the weld part 8 to the seal part 42; and a first retaining ring 36 that is fitted onto an outer peripheral surface 16a of the heat transmission suppression member 16 and that retains the heat transmission suppression member 16 in the inner surface of the first member 2 or the second member 10.