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1. (WO2017038269) PURGING DEVICE, PURGING STOCKER, AND PURGING METHOD

Pub. No.:    WO/2017/038269    International Application No.:    PCT/JP2016/070855
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Fri Jul 15 01:59:59 CEST 2016
IPC: H01L 21/673
B65G 1/00
Applicants: MURATA MACHINERY, LTD.
村田機械株式会社
Inventors: MURATA, Masanao
村田 正直
YAMAJI, Takashi
山路 孝
Title: PURGING DEVICE, PURGING STOCKER, AND PURGING METHOD
Abstract:
[Problem] To provide a purging device that can appropriately perform purging while also conserving a purge gas. [Solution] A purging device (4) that is provided with: a first purging nozzle (41) that supplies a purge gas (G1) to a container (F) that is a purging target; an internal-state detection unit (8) that detects the internal state of the container before the first nozzle begins a purging process; and a purge determination unit (48) that, on the basis of detection results from the internal-state detection unit, determines purging conditions for the container.