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1. (WO2017038168) GATE ELECTRODE AND DEVICE FOR ANALYZING ION MOBILITY

Pub. No.:    WO/2017/038168    International Application No.:    PCT/JP2016/065199
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Tue May 24 01:59:59 CEST 2016
IPC: G01N 27/62
H01J 49/06
Applicants: SHIMADZU CORPORATION
株式会社島津製作所
Inventors: IMAZU, Akiko
今津 亜季子
IZUMI, Hideaki
出水 秀明
Title: GATE ELECTRODE AND DEVICE FOR ANALYZING ION MOBILITY
Abstract:
In a gate electrode (10A) used as a shutter gate, a pair of electroconductive securing members (131, 132) that are made of metal and have the same size are attached inside a rectangular opening (12) in a ceramic base (11), and ceramic insulating securing members (141, 142) are attached on the inward sides of the electroconductive securing members (131, 132). Linking portions (151a, 152a) of a set of two interdigitated electrodes (151, 152) are anchored in the electroconductive securing members (131, 132), and the terminals of thin-line electrodes are anchored in the insulating securing members (141, 142). Setting the length L of the opening (12) and the width D of the electroconductive securing members (131, 132) to certain values in accordance with the coefficient of thermal expansion of each of these members makes it possible to minimize tension and slackness in the electrodes through a balance between the elongation of the electrodes and the expansion of the anchored portions of the electrodes that accompany an increase in temperature. This makes it possible to increase the temperature of a drift region to a greater extent than practiced in the past, and to perform high-precision, high-resolution analysis in which the effects of residual water vapor, etc., are eliminated.