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1. (WO2017037976) SUBSTRATE TRANSFER APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2017/037976 International Application No.: PCT/JP2016/003065
Publication Date: 09.03.2017 International Filing Date: 24.06.2016
IPC:
H01L 21/677 (2006.01) ,B25J 9/06 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9
Programme-controlled manipulators
06
characterised by multi-articulated arms
Applicants:
川崎重工業株式会社 KAWASAKI JUKOGYO KABUSHIKI KAISHA [JP/JP]; 兵庫県神戸市中央区東川崎町3丁目1番1号 1-1, Higashikawasaki-cho 3-chome, Chuo-ku, Kobe-shi, Hyogo 6508670, JP
カワサキロボティクス(アメリカ合衆国),インク. KAWASAKI ROBOTICS (USA), INC. [US/US]; ミシガン州ウィクソムレイクビュウドライブ 28140 28140, Lakeview Drive, Wixom, Michigan 48393, US
Inventors:
後藤 博彦 GOTO, Hirohiko; --
ゼン ミン ZENG, Ming; --
バルワニ アヴィッシュ BHARWANI, Avish; --
小野 茂樹 ONO, Shigeki; --
Agent:
特許業務法人 有古特許事務所 PATENT CORPORATE BODY ARCO PATENT OFFICE; 兵庫県神戸市中央区東町123番地の1 貿易ビル3階 3rd Fl., Bo-eki Bldg., 123-1, Higashimachi, Chuo-ku, Kobe-shi, Hyogo 6500031, JP
Priority Data:
14/844,81903.09.2015US
Title (EN) SUBSTRATE TRANSFER APPARATUS
(FR) APPAREIL DE TRANSFERT DE SUBSTRAT
(JA) 基板移載装置
Abstract:
(EN) This substrate transfer apparatus is provided with a casing and a substrate conveyance robot. The casing is larger in size in the second direction Y than in the first direction X, and has a conveyance chamber and a wall that forms at least one opening arranged on at least one side of the conveyance chamber in the first direction X. The substrate conveyance robot is provided with: a base; a robot arm; a robot hand; and a controller. When a space excluding a predetermined exclusive area from the conveyance chamber is defined as an effective conveyance chamber, a total link length DL of a link is smaller than a conveyance chamber size Dx, and a total hand length Dh of the robot hand is equal to or larger than an effective conveyance chamber size Dx'.
(FR) L'invention concerne un appareil de transfert de substrat pourvu d'un boîtier et d'un robot de transport de substrat. Le boîtier présente une dimension plus grande dans la deuxième direction Y que dans la première direction X, et possède une chambre de transport et une paroi qui forme au moins une ouverture disposée sur au moins un côté de la chambre de transport dans la première direction X. Le robot de transport de substrat comprend une base, un bras de robot, une main de robot et un contrôleur. Lorsqu'un espace excluant une zone d'exclusion prédéterminée de la chambre de transport est défini comme étant une chambre de transport effective, une longueur de liaison totale DL d'une liaison est plus petite qu'une taille de chambre de transport Dx et une longueur de main totale Dh de la main de robot est égale ou supérieure à une taille de chambre de transport effective Dx'.
(JA) 基板移載装置は、筐体と基板搬送ロボットとを備える。筐体は、第1方向Xの寸法と比較して第2方向Yの寸法が大きく、搬送室、及び、搬送室の第1方向Xの少なくとも一方に配置された少なくとも1つの開口とを形成する壁を有する。基板搬送ロボットは、基台、ロボットアーム、ロボットハンド、及び、コントローラを有する。所定の排他領域を搬送室から除いた空間を有効搬送室と規定したときに、リンクのリンク全長DLは搬送室寸法Dxよりも小さく、且つ、ロボットハンドのハンド全長Dhは有効搬送室寸法Dx'以上である。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)