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1. (WO2017037844) IC TEST SYSTEM

Pub. No.:    WO/2017/037844    International Application No.:    PCT/JP2015/074755
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Tue Sep 01 01:59:59 CEST 2015
IPC: G01R 31/26
Inventors: MATSUMOTO, Shouhei
松本 祥平
HASEBE, Shinichi
長谷部 真一
小泉 光雄
ARAI, Yoshinori
荒井 義則
YOKOO, Masayoshi
横尾 政好
HARADA, Keitaro
原田 啓太郎
An IC device 4 of the present invention is provided with a robot arm 6 that transfers an IC device D to a test head 2 that tests the IC device. The test head 2 is provided with a socket 3 having a placing surface 3a, on which the IC device D is to be placed, said socket attaching to the test head the IC device placed on the placing surface. The robot arm 6 is provided with: a contact head 61, which holds the IC device D when transferring the IC device D, and presses the IC Device to the test head when testing the IC device; and a non-contact displacement meter 71 that moves with moving of the contact head 61. The non-contact displacement meter 71 is disposed to the robot arm 6 such that the non-contact displacement meter measures a distance by outputting a beam in the direction perpendicular to the placing surface 3a.