Search International and National Patent Collections
|1. (WO2017037844) IC TEST SYSTEM|
|Title:||IC TEST SYSTEM|
An IC device 4 of the present invention is provided with a robot arm 6 that transfers an IC device D to a test head 2 that tests the IC device. The test head 2 is provided with a socket 3 having a placing surface 3a, on which the IC device D is to be placed, said socket attaching to the test head the IC device placed on the placing surface. The robot arm 6 is provided with: a contact head 61, which holds the IC device D when transferring the IC device D, and presses the IC Device to the test head when testing the IC device; and a non-contact displacement meter 71 that moves with moving of the contact head 61. The non-contact displacement meter 71 is disposed to the robot arm 6 such that the non-contact displacement meter measures a distance by outputting a beam in the direction perpendicular to the placing surface 3a.