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1. (WO2017037842) HELIUM LEAK DETECTOR

Pub. No.:    WO/2017/037842    International Application No.:    PCT/JP2015/074745
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Tue Sep 01 01:59:59 CEST 2015
IPC: G01M 3/20
Applicants: SHIMADZU EMIT CO.,LTD.
島津エミット株式会社
Inventors: IGAWA, Akio
井川 秋夫
Title: HELIUM LEAK DETECTOR
Abstract:
[Problem] To allow correction of a measurement value using a theoretical background. [Solution] A helium leak detector connected to a specimen via a jig. This helium leak detector is provided with: an interface unit provided with an input field for inputting information related to the pressure at which the jig was exposed to the helium and information relation to the time for which the jig was exposed to the helium; a helium detection unit for detecting helium, and a correction unit for correcting the detection results detected by the helium detection unit, on the basis of information related to the pressure inputted from the interface unit, information relating to the time inputted from the interface unit, and a reference permeation/saturation amount of the jig inputted in advance.