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1. (WO2017037775) PLASMA IRRADIATION DEVICE

Pub. No.:    WO/2017/037775    International Application No.:    PCT/JP2015/074382
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Sat Aug 29 01:59:59 CEST 2015
IPC: H05H 1/24
Applicants: FUJI MACHINE MFG. CO., LTD.
富士機械製造株式会社
Inventors: IKEDO, Toshiyuki
池戸 俊之
JINDO, Takahiro
神藤 高広
Title: PLASMA IRRADIATION DEVICE
Abstract:
In this atmospheric pressure plasma irradiation device (10), an upper cover (76) descends and makes intimate contact with a lower cover (78) to seal a cover housing (22). Then, an inert gas is fed into the interior of the sealed cover housing (22), and plasma is subsequently discharged by a plasma generation device (20) towards the interior of the cover housing (22). The supply of the inert gas into the interior of the cover housing (22) is maintained while the plasma is being discharged. It thereby becomes possible for air to be discharged from the interior of the cover housing (22) by the inert gas, and for the concentration of oxygen around a body to be treated by plasma irradiation to be managed.