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1. (WO2017037419) ABATEMENT APPARATUS

Pub. No.:    WO/2017/037419    International Application No.:    PCT/GB2016/052598
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Tue Aug 23 01:59:59 CEST 2016
IPC: B01D 53/00
B01D 53/80
F23D 14/16
Applicants: EDWARDS LIMITED
Inventors: PRICE, Duncan Michael
KNIGHT, Gary Peter
Title: ABATEMENT APPARATUS
Abstract:
An abatement apparatus and method are disclosed. The abatement apparatus is for treating an effluent gas stream from a manufacturing processing tool and comprises: a porous element at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber for treatment of the effluent gas stream; and an infra-red heating device operable to emit infra-red energy to heat the porous element which heats the treatment materials as they pass through the porous element into the treatment chamber. In this way, infra-red energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This provides for greater flexibility in the use of such apparatus since the apparatus can be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber enables significantly more energy to be imparted into the treatment materials as they transit through the porous sleeve.