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1. (WO2017037338) APPARATUS AND METHOD FOR PROVIDING A COATING TO A SURFACE OF A SUBSTRATE

Pub. No.:    WO/2017/037338    International Application No.:    PCT/FI2016/050592
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Wed Aug 31 01:59:59 CEST 2016
IPC: C23C 16/54
C23C 16/455
Applicants: BENEQ OY
Inventors: KETO, Leif
Title: APPARATUS AND METHOD FOR PROVIDING A COATING TO A SURFACE OF A SUBSTRATE
Abstract:
The invention relates to an apparatus and to a method for providing an ALD coating to a surface (1a) of a substrate (1). The apparatus comprises at least one ALD coating unit (2) for coating the surface (1a) of the substrate (1), a first reel (3) for unwinding the substrate (1) to be coated, a second reel (4) for rewinding the coated substrate (1), one or rnore primary support structures (5) provided on the same side of the substrate (1) as the surface (1a) to be coated or the coated surface (1a) for forming a substrate transport path from the first reel (3) through the at least one primary support structure (5) to the second reel (4), and an interleave web (6) in connection with each of the one or more primary support structures (5). Said interleave web (8) is arranged to protect the surface (1a) to be coated or the coated surface (la) when the substrate (1) is passing through the one or more primary support structures (5). Said interleave web (6) is arranged to move together with the substrate (1) along at least part of the substrate transport path. The interleave web (8) is arranged between each of the one or more primary support structures (5) and the surface (la) to be coated or the coated surface (1a) such that the surface (la) to be coated or the coated surface (1a) is arranged to contact only with the interleave web (8) along the substrate transport path from the first reel (3) to the second reel (4).