Search International and National Patent Collections

1. (WO2017037333) A METHOD FOR FORMING APPARATUS COMPRISING TWO DIMENSIONAL MATERIAL

Pub. No.:    WO/2017/037333    International Application No.:    PCT/FI2016/050550
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Sat Aug 06 01:59:59 CEST 2016
IPC: H01L 29/66
H01L 29/778
H01L 29/12
H01L 29/06
H01L 29/16
G01N 27/414
H01L 31/028
H01L 31/0352
Applicants: NOKIA TECHNOLOGIES OY
Inventors: COTTON, Darryl
LIU, Yinglin
ROBINSON, Adam
BESSONOV, Aleksander
WHITE, Richard
Title: A METHOD FOR FORMING APPARATUS COMPRISING TWO DIMENSIONAL MATERIAL
Abstract:
A method and apparatus, the method comprising: forming a layer of two dimensional material (23), in particular graphene, on a first release layer; forming, possibly a (gate) insulating layer (35), and at least two, preferably three, electrodes (25); forming a second release layer overlaying at least a portion of the layer of two dimensional material; providing a mouldable polymer (24, 26, 28) overlaying the at least two electrodes and the second release layer; and removing the first and second release layers to provide a cavity (29) between the mouldable polymer (26) and the layer of two dimensional material (23).