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1. (WO2017037014) METHOD AND STATION FOR MEASURING THE CONTAMINATION OF A TRANSPORT BOX FOR THE CONVEYING AND ATMOSPHERIC STORAGE OF SUBSTRATES

Pub. No.:    WO/2017/037014    International Application No.:    PCT/EP2016/070309
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Tue Aug 30 01:59:59 CEST 2016
IPC: H01L 21/67
H01L 21/673
Applicants: PFEIFFER VACUUM
Inventors: LE-BARILLEC, Olivier
BOUNOUAR, Julien
Title: METHOD AND STATION FOR MEASURING THE CONTAMINATION OF A TRANSPORT BOX FOR THE CONVEYING AND ATMOSPHERIC STORAGE OF SUBSTRATES
Abstract:
The invention relates to a method for measuring the contamination of a transport box (2) for the conveying and atmospheric storage of substrates (3), which comprises measuring the concentration of at least one gaseous species inside the transport box (2) by means of a measurement device including at least one gas analyser (5, 5b) and a measurement pipe (6) connecting the at least one gas analyser (5, 5b) to an interface (7), the interface (7) bringing the measurement pipe (6) into communication with the atmosphere inside at least one transport box (2), characterised in that a stream of gas containing steam is provided in the measurement device. The present invention likewise relates to a station for measuring the contamination of a transport box for the conveying and atmospheric storage of substrates.