Search International and National Patent Collections

1. (WO2017036944) A METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY

Pub. No.:    WO/2017/036944    International Application No.:    PCT/EP2016/070161
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Sat Aug 27 01:59:59 CEST 2016
IPC: G03F 1/62
Applicants: ASML NETHERLANDS B.V.
Inventors: HOUWELING, Zomer, Silvester
CASIMIRI, Eric, Willem, Felix
DRUZHININA, Tamara
JANSSEN, Paul
KUIJKEN, Michael, Alfred, Josephus
LEENDERS, Martinus, Hendrikus, Antonius
OOSTERHOFF, Sicco
PÉTER, Mária
VAN DER ZANDE, Willem, Joan
VAN ZWOL, Pieter-Jan
VERBRUGGE, Beatrijs, Louise, Marie-Joseph, Katrien
VERMEULEN, Johannes, Petrus, Martinus, Bernardus
VLES, David, Ferdinand
VOORTHUIJZEN, Willem-Pieter
Title: A METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY
Abstract:
A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a planar substrate and at least one membrane layer, wherein the planar substrate comprises an inner region and a border region around the inner region; positioning the stack on a support such that the inner region of the planar substrate is exposed; and selectively removing the inner region of the planar substrate using a non-liquid etchant, such that the membrane assembly comprises: a membrane formed from the at least one membrane layer; and a border holding the membrane, the border formed from the border region of the planar substrate.