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1. (WO2017036830) A GAS LEAK DETECTOR AND A METHOD OF DETECTING A LEAK OF GAS

Pub. No.:    WO/2017/036830    International Application No.:    PCT/EP2016/069772
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Tue Aug 23 01:59:59 CEST 2016
IPC: G01F 1/88
G03F 7/00
G01M 3/28
Applicants: ASML NETHERLANDS B.V.
Inventors: RENCKENS, Theodorus, Johannes, Antonius
VAN DEN HEUVEL, Nils-Peter, Martin
WERNAART, Wilhelmus, Antonius
KUIJPER, Anthonie
Title: A GAS LEAK DETECTOR AND A METHOD OF DETECTING A LEAK OF GAS
Abstract:
A gas leak detector for detecting gas leakage from a flow path between a first flow restriction and a second flow restriction to gas flowing in the flow path, the first flow restriction upstream and spaced apart from the second flow restriction, the gas leak detector comprising: a first sensor device for sensing a first difference between a first pressure of gas upstream of the first flow restriction and a second pressure of gas inside or downstream of the first flow restriction in the flow path and to generate on the basis of the first difference a first electrical signal indicative of a first mass flow rate of gas through the first flow restriction; a second sensor device for sensing a second difference between a third pressure of gas upstream of the second flow restriction and a fourth pressure of gas inside or downstream of the second flow restriction in the flow path to generate on the basis of the second difference a second electrical signal indicative of a second mass flow rate through the second flow restriction; and a comparator for comparing a first magnitude of the first electrical signal and a second magnitude of the second electrical signal and generating an alarm signal if a difference between the first magnitude and the second magnitude is greater than a threshold value and/or generating a safe signal if the difference between the first magnitude and the second magnitude is lower than the threshold value.