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1. (WO2017036717) BEAM SPLITTING APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2017/036717 International Application No.: PCT/EP2016/068513
Publication Date: 09.03.2017 International Filing Date: 03.08.2016
IPC:
G02B 5/18 (2006.01) ,G02B 27/10 (2006.01) ,G03F 7/20 (2006.01) ,G02B 6/293 (2006.01) ,H01S 3/09 (2006.01)
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5
Optical elements other than lenses
18
Diffracting gratings
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
10
Beam splitting or combining systems
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6
Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
24
Coupling light guides
26
Optical coupling means
28
having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
293
with wavelength selective means
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
09
Processes or apparatus for excitation, e.g. pumping
Applicants:
ASML NETHERLANDS B.V. [NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors:
DE VRIES, Gosse, Charles; NL
NIENHUYS, Han-Kwang; NL
Agent:
SLENDERS, Peter; NL
Priority Data:
EP15183677.203.09.2015EP
Title (EN) BEAM SPLITTING APPARATUS
(FR) APPAREIL DE DIVISION DE FAISCEAU
Abstract:
(EN) A beam-splitting apparatus (40) arranged to receive an input radiation beam (B) and split the input radiation beam (B) into a plurality of output radiation beams (Ba - Bj). The beam-splitting apparatus (40) comprising a plurality of reflective diffraction gratings (41-45) arranged to receive a radiation beam and configured to form a diffraction pattern comprising a plurality of diffraction orders, at least some of the reflective diffraction gratings (42-45) being arranged to receive a 0th diffraction order formed at another of the reflective diffraction gratings (41-44). The reflective diffraction gratings are arranged such that the optical path of each output radiation beam (Ba - Bj) includes no more than one instance of a diffraction order which is not a 0th diffraction order.
(FR) La présente invention concerne un appareil de division de faisceau, qui est prévu pour recevoir un faisceau de rayonnement d'entrée et pour diviser le faisceau de rayonnement d'entrée en une pluralité de faisceaux de rayonnement de sortie. L'appareil de division de faisceau comprend une pluralité de réseaux de diffraction réfléchissants destinés à recevoir un faisceau de rayonnement et conçus pour former une figure de diffraction incluant une pluralité d'ordres de diffraction, au moins certains des réseaux de diffraction réfléchissants étant prévus pour recevoir un 0ème ordre de diffraction formé dans un autre réseau de diffraction réfléchissant. Les réseaux de diffraction réfléchissants sont disposés de telle sorte que le chemin optique de chaque faisceau de rayonnement de sortie n'inclue pas plus d'une occurrence d'un ordre de diffraction qui n'est pas un 0ème ordre de diffraction.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)