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1. (WO2017036619) X-RAY DETECTOR HAVING A CAPACITANCE-OPTIMISED LIGHT-TIGHT PAD STRUCTURE

Pub. No.:    WO/2017/036619    International Application No.:    PCT/EP2016/062650
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Sat Jun 04 01:59:59 CEST 2016
IPC: H01L 27/146
Applicants: SIEMENS HEALTHCARE GMBH
Inventors: GROEPL, Martin
GÖDERER, Edgar
SUTTORP, Thomas
Title: X-RAY DETECTOR HAVING A CAPACITANCE-OPTIMISED LIGHT-TIGHT PAD STRUCTURE
Abstract:
The invention relates to an x-ray detector (1) comprising a substrate (23) which has an electrically conductive connection between a read-out contact (57) in the region of the top side of the substrate (23) and an input of a pre-amplifier (3) in an active layer (5) of an integrated circuit. A first electrically conductive connection (17) is provided between the read-out contact and a second electrically conductive connection (19). A surface of a first light protection (7) on the top side of the substrate (23) is larger than a surface of a light-permeable region (15) in the substrate, laterally delimited by a second light protection (9), so that the surface of the first light protection (7) covers the surface of the light-permeable region (15) in a first projection along the surface normal. The second electrically conductive connection (19) is provided within a second projection of the surface of the light-permeable region (15) along the surface normal and below the second light protection (9). A third electrically conductive connection (21) between the second electrically conductive connection (19) and the pre-amplifier (3) is provided below the second light protection (9). The input of the pre-amplifier (3) is protected against direct incidence of light.