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1. (WO2017036527) METHOD OF PRODUCING GRAPHENE

Pub. No.:    WO/2017/036527    International Application No.:    PCT/EP2015/070096
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Thu Sep 03 01:59:59 CEST 2015
IPC: C30B 25/18
C30B 29/02
Applicants: INSTYTUT TECHNOLOGII MATERIALOW ELEKTRONICZNYCH
Inventors: PASTERNAK, Iwona
STRUPINSKI, Włodzimierz
Title: METHOD OF PRODUCING GRAPHENE
Abstract:
The invention is related to a method of producing graphene by deposition of carbon from gaseous phase on a substrate in a reactor, comprising following steps: a) providing the substrate in the reactor; b) providing elevated temperature conditions in the reactor; c) providing lower pressure conditions in the reactor; d) evoking a flow of a gas in the reactor, said gas comprising at least a carbon precursor gas mixed with an inert gas and optionally mixed with hydrogen; e) under such conditions of the elevated temperature, the lower pressure and the gas flow - depositing carbon from the gaseous phase on the substrate thus forming graphene; characterized in that a wafer having a crystalline layer of germanium having the crystallographic orientation (100) intended for graphene deposition thereon is used as the substrate.