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1. (WO2017036106) MAGNETIC CONTROL BOARD, MAGNETIC CONTROL DEVICE AND MAGNETIC CONTROL SPUTTERING DEVICE

Pub. No.:    WO/2017/036106    International Application No.:    PCT/CN2016/074364
Publication Date: Fri Mar 10 00:59:59 CET 2017 International Filing Date: Wed Feb 24 00:59:59 CET 2016
IPC: C23C 14/35
Applicants: BOE TECHNOLOGY GROUP CO., LTD.
京东方科技集团股份有限公司
Inventors: SUN, Zhongyuan
孙中元
LI, Xiaohu
李晓虎
Title: MAGNETIC CONTROL BOARD, MAGNETIC CONTROL DEVICE AND MAGNETIC CONTROL SPUTTERING DEVICE
Abstract:
The present invention discloses a magnetic control board (201), which is used for generating a magnetic field in a magnetic control sputtering process and composed of a plurality of detachably-connected magnetic control board units (2011). The plurality of magnetic control board units (2011) are used for generating the magnetic field, and faces of the same polarity of all the magnets (401) in the plurality of magnetic control board units (2011) are arranged on the same side of the magnetic control board (201). Further, the present invention discloses a magnetic control device comprising the magnetic control board (201), and a magnetic control sputtering device comprising the magnetic control device.