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1. (WO2017035338) DEEP MICROWELL DESIGNS AND METHODS OF MAKING THE SAME

Pub. No.:    WO/2017/035338    International Application No.:    PCT/US2016/048658
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Fri Aug 26 01:59:59 CEST 2016
IPC: G01N 27/414
Applicants: LIFE TECHNOLOGIES CORPORATION
Inventors: BUSTILLO, James
GRAY, Jeremy
OWENS, Jordan
Title: DEEP MICROWELL DESIGNS AND METHODS OF MAKING THE SAME
Abstract:
An apparatus includes a substrate, a gate structure disposed over the substrate and having an upper surface, a well structure disposed over the substrate and defining a well over the upper surface of the gate structure, a conductive layer disposed on the upper surface of the gate structure and at least partially extending along a wall of the well in the well structure, and a dielectric structure disposed over the well structure and defining an opening to the well.