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1. (WO2017035307) ELECTRON BEAM APPARATUS WITH ADJUSTABLE AIR GAP

Pub. No.:    WO/2017/035307    International Application No.:    PCT/US2016/048561
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Fri Aug 26 01:59:59 CEST 2016
IPC: C23C 14/30
Applicants: ENERGY SCIENCES INC.
Inventors: RANGWALLA, Imtiaz, J.
ALEXY, Rich
MAGUIRE, Edward
Title: ELECTRON BEAM APPARATUS WITH ADJUSTABLE AIR GAP
Abstract:
An electron beam processing apparatus for treating a substrate is provided. The apparatus has an electron beam generating assembly housed in a chamber that includes a filament for generating a plurality of electrons upon heating. The apparatus may also have a foil support assembly that is configured to direct the plurality of electrons through a thin foil out of the chamber. The apparatus may further have a processing assembly that is configured to pass the substrate by the thin foil so that the plurality of electrons penetrates the substrate and cause a chemical reaction. A distance of an air gap between the thin foil and the substrate may be adjustable.