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1. (WO2017035256) INTERLOCKING MODULAR SUBSTRATE SUPPORT COLUMNS

Pub. No.:    WO/2017/035256    International Application No.:    PCT/US2016/048443
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Thu Aug 25 01:59:59 CEST 2016
IPC: H01L 21/673
Applicants: ENTEGRIS, INC.
Inventors: FULLER, Matthew
HARR, Colton
Title: INTERLOCKING MODULAR SUBSTRATE SUPPORT COLUMNS
Abstract:
A substrate support assembly for a substrate container. The assembly may include a pair of substrate support columns each including a stack of a plurality of shelf members and a plurality of support rods inserted through the stack for securing the stack together. Each shelf member may include a blade portion having first and second opposing surfaces and an inner and outer periphery. Each surface of the blade portion may include a rib structure and a plurality of bosses positioned towards the outer periphery and extending from a forward portion to a rearward portion of the blade portion. Interlocking features may be defined on the rib structures. The stack of the shelf members may include each shelf member stacked with one or more adjacent shelf members via the rib structures, thereby interlocking each shelf member with the one or more adjacent shelf members via the interlocking features.