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1. (WO2017035130) SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXTURES USED IN A HIGH ENERGY LASER SYSTEM

Pub. No.:    WO/2017/035130    International Application No.:    PCT/US2016/048169
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Wed Aug 24 01:59:59 CEST 2016
IPC: H01S 3/225
H01S 3/03
H01S 3/097
Applicants: MATHESON TRI-GAS, INC.
Inventors: VININSKI, Joseph
SCOTT, Dane
Title: SYSTEM FOR RECLAIMING, REBALANCING AND RECIRCULATING LASER GAS MIXTURES USED IN A HIGH ENERGY LASER SYSTEM
Abstract:
The present invention relates to a system for recirculating the gas atmosphere within an excimer laser system, where contaminates, created in the laser's operation, are removed, and the gas concentrations of additive gases, such as Xe, Kr, or others, depleted in the laser operation, are rebalanced to specific lazing mixtures by analyzation and component replenishment from one or more external supplies.