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1. (WO2017034807) LASER SCAN SEQUENCING AND DIRECTION WITH RESPECT TO GAS FLOW
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2017/034807 International Application No.: PCT/US2016/046327
Publication Date: 02.03.2017 International Filing Date: 10.08.2016
IPC:
G01N 21/88 (2006.01) ,G01N 1/22 (2006.01) ,G01N 11/02 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
1
Sampling; Preparing specimens for investigation
02
Devices for withdrawing samples
22
in the gaseous state
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
11
Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
02
by measuring flow of the material
Applicants:
ELECTRO SCIENTIFIC INDUSTRIES, INC. [US/US]; 13900 NW Science Park Drive Portland, OR 97229, US
Inventors:
FINN, Daragh; US
FERGUSON, Robert A.; US
Agent:
LEVINE, Michael L.; US
Priority Data:
62/210,19326.08.2015US
Title (EN) LASER SCAN SEQUENCING AND DIRECTION WITH RESPECT TO GAS FLOW
(FR) SÉQUENÇAGE ET DIRECTION DE BALAYAGE LASER PAR RAPPORT À UN ÉCOULEMENT DE GAZ
Abstract:
(EN) Employing laser scanning directions (20) that are oblique to and against a predominant gas flow direction (25) equalize the quality and waviness characteristics of orthogonal scribe lines (26) made by the laser scans. Positioning and sequence of multiple scan passes to form a feature wider than the width of a scribe line (26) can be controlled to enhance quality and waviness characteristics of the edges of the feature.
(FR) L'utilisation de directions de balayage laser (20) qui sont obliques par rapport à une direction d'écoulement de gaz (25) prédominante égalise la qualité et les caractéristiques d'ondulation de lignes de tracé (26) orthogonal obtenues au moyen des balayages laser. Le positionnement et la séquence de multiples passages de balayage en vue de former un élément plus large que la largeur d'une ligne de tracé (26) peuvent être réglés de sorte à améliorer la qualité et les caractéristiques d'ondulation des bords de l'élément.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)