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1. (WO2017034590) METHOD AND STRUCTURE PROVIDING A FRONT- END- OF- LINE AND A BACK-END-OF-LINE COUPLED WAVEGUIDES

Pub. No.:    WO/2017/034590    International Application No.:    PCT/US2015/047299
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Fri Aug 28 01:59:59 CEST 2015
IPC: G02B 6/12
Applicants: MICRON TECHNOLOGY, INC.
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Inventors: MEADE, Roy
ORCUTT, Jason
POPOVIC, Milos
SHAINLINE, Jeffrey
STERNBERG, Zvi
STOJANOVIC, Vladimir
TEHAR-ZAHAV, Ofer
Title: METHOD AND STRUCTURE PROVIDING A FRONT- END- OF- LINE AND A BACK-END-OF-LINE COUPLED WAVEGUIDES
Abstract:
An integrated structure and method of formation provide a lower level waveguide having a core of a first material and a higher level waveguide having a core of a second material and a coupling region for coupling the two waveguides together. The different core materials provided different coupled waveguides having different light loss characteristics.