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1. (WO2017034221) LIGHT SOURCE MODULE UNIT FOR EXPOSURE AND EXPOSURE DEVICE HAVING LIGHT SOURCE MODULE UNIT
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Pub. No.: WO/2017/034221 International Application No.: PCT/KR2016/009139
Publication Date: 02.03.2017 International Filing Date: 19.08.2016
IPC:
G03F 7/20 (2006.01) ,H01L 21/027 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
Applicants:
조남직 CHO, Nam Jik [KR/KR]; KR
Inventors:
조남직 CHO, Nam Jik; KR
인치억 IN, Chi Eok; KR
박종원 PARK, Jong Won; KR
송우리 SONG, Woo Ree; KR
정해일 JUNG, Hae Il; KR
Agent:
특허법인 네이트 NEIT INTERNATIONAL PATENT LAW FIRM; 서울시 강남구 테헤란로6길 16, 4F(역삼동, 수산빌딩) (Yeoksam-dong, Susan B/D) 4F, 16, Teheran-ro 6-gil Gangnam-gu Seoul 06233, KR
Priority Data:
10-2015-011808521.08.2015KR
Title (EN) LIGHT SOURCE MODULE UNIT FOR EXPOSURE AND EXPOSURE DEVICE HAVING LIGHT SOURCE MODULE UNIT
(FR) UNITÉ DE MODULE DE SOURCE DE LUMIÈRE POUR EXPOSITION, ET DISPOSITIF D'EXPOSITION AYANT UNE UNITÉ DE MODULE DE SOURCE DE LUMIÈRE
(KO) 노광용 광원모듈 유닛 및 그 광원모듈 유닛이 구비된 노광장치
Abstract:
(EN) The present invention provides an integrated light source module unit for exposure and an exposure device having the light source module unit, which can ensure exposure performance capable of dramatically improving the microfabrication and the resolution of exposure patterns and, at the same time, has been improved so as to be economically substitutable for the light source of a conventional exposure device since low power consumption and, particularly, ultraviolet (UV) lights having a high-efficiency and high-output single wavelength and short wavelength are ensured by maximizing light output power by a combination of modules each comprising: a center light source part comprising a light source panel formed by mounting a plurality of unit UV light emitting diodes (LEDs) on a circuit board in a matrix array structure, and an optical panel formed by providing a plurality of unit condensing lenses on the optical panels, which are arranged at light-emitting sides of the LEDs to face the light source panel, in a matrix array structure in a state in which the condensing lenses are eccentric toward a random reference center axial line, which passes the center of a UV LED array on the light source panel, with respect to a major optical axis at the positions respectively corresponding to the LEDs; and a plurality of peripheral light source parts radially and equally arranged in an inclined state so as to face a major light-emitting axis of the unit UV LED of the center light source part.
(FR) La présente invention concerne une unité de module de source de lumière intégrée pour une exposition et un dispositif d'exposition ayant l'unité de module de source de lumière, qui peut garantir une performance d'exposition en mesure d'améliorer considérablement la micro-fabrication et la résolution de motifs d'exposition et, en même temps, a été améliorée pour être économiquement substituable à la source de lumière d'un dispositif d'exposition classique étant donné que des lumières à faible consommation d'énergie et, en particulier, ultraviolettes (UV) ayant une longueur d'onde courte et une longueur d'onde unique de haute efficacité et de haut débit sont garanties en rendant maximale la puissance de sortie de lumière par une combinaison de modules comprenant chacun : une partie de source de lumière centrale comprenant un panneau de source de lumière formé par montage d'une pluralité de diodes électroluminescentes (DEL) UV unitaires sur une carte de circuits imprimés dans une structure de réseau matriciel, et un panneau optique formé par disposition d'une pluralité de lentilles de condensation unitaires sur les panneaux optiques, qui sont agencées au niveau des côtés d'émission de lumière des DEL pour faire face au panneau de source de lumière, dans une structure de réseau matriciel dans un état dans lequel les lentilles de condensation sont excentriques vers une ligne axiale de centre de référence aléatoire, qui passe par le centre d'un réseau de DEL UV sur le panneau de source de lumière, par rapport à un axe optique principal au niveau des positions correspondant respectivement aux DEL; et une pluralité de parties de source de lumière périphériques disposées radialement et de façon égale dans un état incliné de façon à faire face à un axe d'émission de lumière principal de la DEL UV unitaire de la partie de source de lumière centrale.
(KO) 본 발명은 다수의 단위 자외선 발광 소자(UV LED)가 회로 기판 상에 매트릭스 형태의 어레이 구조로 실장되어 이루어진 광원 패널과, 그 광원 패널과 대면하도록 상기 발광 소자의 광출사측에 배치되는 광학 패널에 다수의 단위 집광 렌즈가 상기 발광 소자에 각각 대응되는 위치에서 주광축에 대해 상기 광원 패널 상에 있는 자외선 발광소자 어레이의 중심을 지나는 임의의 기준 중심축선 측으로 편심된 상태의 매트릭스 형태의 어레이 구조로 구성되어 이루어진 광학 패널로 구성된 중심 광원부와 상기 중심 광원부의 단위 자외선 발광 소자의 주광출사축을 향하도록 경사진 상태로 방사상으로 균등하게 배치된 복수의 주변 광원부로 이루어진 모듈의 조합에 의해 광 출력 파워의 극대화를 통한 저소비전력과 특히, 고효율, 고출력의 단일파장, 단파장의 자외선광을 구현함으로서 노광패턴의 미세화와 해상도를 획기적으로 향상시킬 수 있는 노광 성능을 확보할 수 있는 동시에 기존 노광장치의 광원을 경제적으로 대체할 수 있도록 개량한 집약형 노광용 광원모듈 유닛 및 그 광원모듈 유닛이 구비된 노광장치를 제공한다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)