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1. (WO2017034190) SAMPLE CHAMBER DEVICE FOR ELECTRON MICROSCOPE, AND ELECTRON MICROSCOPE COMPRISING SAME

Pub. No.:    WO/2017/034190    International Application No.:    PCT/KR2016/008817
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Fri Aug 12 01:59:59 CEST 2016
IPC: H01J 37/26
H01J 37/20
Applicants: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
한국표준과학연구원
Inventors: CHO, Bok Lae
조복래
AHN, Sang Jung
안상정
SUL, Inho
설인호
Title: SAMPLE CHAMBER DEVICE FOR ELECTRON MICROSCOPE, AND ELECTRON MICROSCOPE COMPRISING SAME
Abstract:
The present invention relates to a vacuum sample chamber for a particle and optical device, the vacuum sample chamber comprising: on one surface thereof, an aperture through which a particle beam to be focused along an optical axis of particles such as electrons, ions and neutral particles is incident; and on the opposite surface thereof, a detachable sample holder through which light penetrates, thereby enabling a sample to be observed and analyzed by means of the particle beam and light. The present invention implements: a sample chamber capable of reducing observation time by maintaining a vacuum therein even when a sample is put into or taken out from a sample chamber of an electron microscope or focused ion beam observation equipment, and capable of obtaining an optical image on the outside thereof without inserting a light source or an optical barrel into the sample chamber; and a light-electron fusion microscope comprising the sample chamber.