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1. (WO2017034184) VISION INSPECTION MODULE AND ELEMENT INSPECTION SYSTEM HAVING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2017/034184 International Application No.: PCT/KR2016/008769
Publication Date: 02.03.2017 International Filing Date: 10.08.2016
IPC:
G01N 21/88 (2006.01) ,G06T 7/00 (2017.01) ,H01L 21/66 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
T
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7
Image analysis, e.g. from bit-mapped to non bit-mapped
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66
Testing or measuring during manufacture or treatment
Applicants:
(주)제이티 JT CORPORATION [KR/KR]; 충청남도 천안시 서북구 직산읍 4산단3로 135 135, 4sandan 3-ro, Jiksan-eup Seobuk-gu, Cheonan-si Chungcheongnam-do 31040, KR
Inventors:
유홍준 YOU, Hong Jun; KR
이명국 LEE, Myeong Kuk; KR
배수민 BAE, Su Min; KR
Agent:
특허법인 주원 B&IP-JOOWON PATENT AND LAW FIRM; 서울시 강남구 언주로 711, 건설회관9층 (논현동) (Nonhyeon-dong) 9th Floor, Construction Center, Eonju-ro 711 Gangnam-gu Seoul 06050, KR
Priority Data:
10-2015-012031226.08.2015KR
Title (EN) VISION INSPECTION MODULE AND ELEMENT INSPECTION SYSTEM HAVING SAME
(FR) MODULE DE CONTRÔLE VISUEL ET SYSTÈME DE CONTRÔLE D'ÉLÉMENT COMPORTANT CE DERNIER
(KO) 비전검사모듈 및 그를 가지는 소자검사시스템
Abstract:
(EN) The present invention relates to an element inspection system and, more specifically, to a vision inspection module for performing a vision inspection on a semiconductor element, and an element inspection system having the same. Disclosed is a vision inspection module (50) for performing a vision inspection on a semiconductor element (1) having a polygonal planar shape, the vision inspection module (50) comprising: a single image acquisition unit (100) for acquiring a first planar image for a first plane of the semiconductor element (1) and lateral images for lateral surfaces of polygonal sides of the semiconductor element (1); and an optical system for forming a first optical path (L1) through which the first planar image for the first plane of the semiconductor element (1) arrives at the single image acquisition unit (100) and a plurality of second optical paths (L2) through which the lateral images for the lateral surfaces of the polygonal sides of the semiconductor element (1) respectively arrive at the single image acquisition unit (100).
(FR) La présente invention se rapporte à un système de contrôle d'élément et, de façon plus précise, à un module de contrôle visuel permettant de réaliser un contrôle visuel sur un élément semi-conducteur, et à un système de contrôle d'élément ayant ce dernier. L'invention concerne un module de contrôle visuel (50) destiné à réaliser un contrôle visuel sur un élément semi-conducteur (1) ayant une forme plane polygonale, le module de contrôle visuel (50) comprenant : une seule unité d'acquisition d'image (100) destinée à acquérir une première image plane pour un premier plan de l'élément semi-conducteur (1) et des images latérales de surfaces latérales de côtés polygonaux de l'élément semi-conducteur (1) ; et un système optique destiné à former un premier trajet optique (L1) au moyen duquel la première image plane pour le premier plan de l'élément semi-conducteur (1) arrive au niveau de la seule unité d'acquisition d'image (100), et une pluralité de seconds trajets optiques (L2) au moyen desquels les images latérales des surfaces latérales des côtés polygonaux de l'élément semi-conducteur (1) arrivent respectivement au niveau de la seule unité d'acquisition d'image (100).
(KO) 본 발명은 소자검사시스템에 관한 것으로서, 보다 상세하게는 반도체소자에 대한 비전검사를 수행하는 비전검사모듈 및 그를 가지는 소자검사시스템에 관한 것이다. 본 발명은, 평면형상이 다각형인 반도체소자(1)의 비전검사를 수행하는 비전검사모듈(50)로서, 상기 반도체소자(1)의 제1평면에 대한 제1평면이미지 및 상기 반도체소자(1)의 다각형 변들의 측면들에 대한 측면이미지들을 획득하는 단일이미지획득부(100)와, 상기 반도체소자(1)의 제1평면에 대한 제1평면이미지가 상기 단일이미지획득부(100)에 도달하도록 하는 제1광경로(L1)와, 상기 반도체소자(1)의 다각형 변들의 측면들에 대한 측면이미지들 각각을 상기 단일이미지획득부(100)에 도달하도록 하는 복수의 제2광경로(L2)들을 형성하는 광학계를 포함하는 것을 특징으로 하는 비전검사모듈(50)을 개시한다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)