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1. (WO2017034127) APPARATUS FOR ASSEMBLY AND DISASSEMBLY OF CARTRIDGE FOR WAFER PROBER AND CONTROL METHOD THEREFOR

Pub. No.:    WO/2017/034127    International Application No.:    PCT/KR2016/005749
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Wed Jun 01 01:59:59 CEST 2016
IPC: G01R 1/04
G01R 1/067
G01R 31/26
H01L 21/66
Applicants: SEMICS INC.
주식회사 쎄믹스
Inventors: NA, Hyun Chan
나현찬
Title: APPARATUS FOR ASSEMBLY AND DISASSEMBLY OF CARTRIDGE FOR WAFER PROBER AND CONTROL METHOD THEREFOR
Abstract:
An apparatus for assembly and disassembly of a cartridge, according to the present invention, automatically assembles a portable chuck, a wafer, and a contactor to provide a finished cartridge, or disassembles the cartridge into the portable chuck, the wafer, and the contactor. The apparatus for assembly and disassembly of a cartridge automatically aligns the portable chuck and a chuck receiver, or automatically aligns the wafer and the contactor. In addition, the apparatus for assembly and disassembly of a cartridge has a vacuum device for wafer detection and a vacuum device for chuck detection to continually detect the states of the wafer, the portable chuck, and the contactor in all assembly and disassembly processes, thereby automatically assembling and disassembling the cartridge.