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|1. (WO2017033738) ELECTROSTATIC CHUCK DEVICE|
|Applicants:||SUMITOMO OSAKA CEMENT CO., LTD.
|Title:||ELECTROSTATIC CHUCK DEVICE|
An electrostatic chuck device provided with an electrostatic chuck portion and a temperature adjusting base portion, wherein the electrostatic chuck portion includes a ceramic plate of which one surface is a placement surface for placing a sheet sample, and an electrostatic suction-attachment electrode disposed on the other surface of the ceramic plate from the placement surface, wherein the temperature adjusting base portion is a base portion which is disposed on the electrostatic suction-attachment electrode on the other surface side from the ceramic plate side, and which cools the electrostatic chuck portion, the ceramic plate extends on the temperature adjusting base portion side and includes an embankment portion surrounding the peripheral edges of the electrostatic suction-attachment electrode, the temperature adjusting base portion includes a groove portion accommodating the tip-end portion of the embankment portion, and a gap between the groove portion and the embankment portion is filled with a filling portion comprising resin material.