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1. (WO2017033738) ELECTROSTATIC CHUCK DEVICE

Pub. No.:    WO/2017/033738    International Application No.:    PCT/JP2016/073428
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Wed Aug 10 01:59:59 CEST 2016
IPC: H01L 21/683
H01L 21/3065
H02N 13/00
Applicants: SUMITOMO OSAKA CEMENT CO., LTD.
住友大阪セメント株式会社
Inventors: KOSAKAI Mamoru
小坂井 守
MAETA Shinichi
前田 進一
MAEDA Keisuke
前田 佳祐
Title: ELECTROSTATIC CHUCK DEVICE
Abstract:
An electrostatic chuck device provided with an electrostatic chuck portion and a temperature adjusting base portion, wherein the electrostatic chuck portion includes a ceramic plate of which one surface is a placement surface for placing a sheet sample, and an electrostatic suction-attachment electrode disposed on the other surface of the ceramic plate from the placement surface, wherein the temperature adjusting base portion is a base portion which is disposed on the electrostatic suction-attachment electrode on the other surface side from the ceramic plate side, and which cools the electrostatic chuck portion, the ceramic plate extends on the temperature adjusting base portion side and includes an embankment portion surrounding the peripheral edges of the electrostatic suction-attachment electrode, the temperature adjusting base portion includes a groove portion accommodating the tip-end portion of the embankment portion, and a gap between the groove portion and the embankment portion is filled with a filling portion comprising resin material.