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1. (WO2017033654) OPTICAL MICROSCOPE AND ELECTRONIC MICROSCOPE

Pub. No.:    WO/2017/033654    International Application No.:    PCT/JP2016/071945
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Thu Jul 28 01:59:59 CEST 2016
IPC: G02B 21/24
G01N 21/65
G02B 7/02
G02B 21/26
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社 日立ハイテクノロジーズ
Inventors: SHIBAHARA Masashi
柴原 匡
OSAKA Akimasa
大坂 明正
YAMAMOTO Shuhei
山本 周平
OOURA Takeshi
大浦 剛
SATO Wataru
佐藤 航
Title: OPTICAL MICROSCOPE AND ELECTRONIC MICROSCOPE
Abstract:
The purpose of the present invention is to provide a microscope system that is equipped with a mechanism that reduces influence of thermal deformation when observing a sample for a long time. In order to achieve the purpose, provided is an optical microscope that is equipped with an objective lens, a position adjustment mechanism for adjusting the position of a sample, and a housing having a linear expansion coefficient that is smaller than that of the objective lens. The optical microscope is also equipped with an objective lens holder for holding the objective lens in the housing, the topmost portion of the objective lens is in contact with the objective lens, and the objective lens holder is covering at least a part of the objective lens, and is fixed to the housing at a position lower than the topmost portion of the objective lens.