Search International and National Patent Collections
|1. (WO2017033654) OPTICAL MICROSCOPE AND ELECTRONIC MICROSCOPE|
|Applicants:||HITACHI HIGH-TECHNOLOGIES CORPORATION
|Title:||OPTICAL MICROSCOPE AND ELECTRONIC MICROSCOPE|
The purpose of the present invention is to provide a microscope system that is equipped with a mechanism that reduces influence of thermal deformation when observing a sample for a long time. In order to achieve the purpose, provided is an optical microscope that is equipped with an objective lens, a position adjustment mechanism for adjusting the position of a sample, and a housing having a linear expansion coefficient that is smaller than that of the objective lens. The optical microscope is also equipped with an objective lens holder for holding the objective lens in the housing, the topmost portion of the objective lens is in contact with the objective lens, and the objective lens holder is covering at least a part of the objective lens, and is fixed to the housing at a position lower than the topmost portion of the objective lens.