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1. (WO2017033581) SURFACE SHAPE MEASURING METHOD, MISALIGNMENT AMOUNT CALCULATING METHOD, AND SURFACE SHAPE MEASURING DEVICE

Pub. No.:    WO/2017/033581    International Application No.:    PCT/JP2016/069917
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Wed Jul 06 01:59:59 CEST 2016
IPC: G01B 5/08
G01B 21/10
Applicants: TOKYO SEIMITSU CO., LTD.
株式会社東京精密
Inventors: MASUTA, Hikaru
増田 光
Title: SURFACE SHAPE MEASURING METHOD, MISALIGNMENT AMOUNT CALCULATING METHOD, AND SURFACE SHAPE MEASURING DEVICE
Abstract:
Provided are a surface shape measuring method, a misalignment amount calculating method and a surface shape measuring device with which it is possible to measure the diameter of a workpiece with high precision and good repeatability, and which make it possible to perform measurements with excellent versatility. This surface shape measuring method is provided with: a first acquisition step in which a detector is disposed on one side of a workpiece and first shape data are acquired, the first shape data indicating the surface shape of the workpiece when displacements in the surface of the workpiece are detected using the detector while the workpiece and the detector are caused to rotate relative to one another about a center of rotation; and a second acquisition step in which the detector is disposed on the other side of the workpiece and second shape data are acquired, the second shape data indicating the surface shape of the workpiece when displacements in the surface of the workpiece are detected using the detector while the workpiece and the detector are caused to rotate relative to one another about the center of rotation.