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1. (WO2017033567) FILM THICKNESS DISTRIBUTION MEASURING DEVICE

Pub. No.:    WO/2017/033567    International Application No.:    PCT/JP2016/069425
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Fri Jul 01 01:59:59 CEST 2016
IPC: G01B 11/06
Applicants: TORAY ENGINEERING CO., LTD.
東レエンジニアリング株式会社
Inventors: OTSUKI, Masafumi
大槻 真左文
KITAGAWA, Katsuichi
北川 克一
Title: FILM THICKNESS DISTRIBUTION MEASURING DEVICE
Abstract:
The objective of the present invention is to provide a device with which it is possible to measure the film thickness distribution of a lubricating agent which lubricates contacting parts of substances in a state of elasto-hydrodynamic lubrication (EHL), over a wide range, irrespective of whether the relative speed between a base plate and a rotating body changes. More specifically, this film thickness distribution measuring device for measuring the film thickness of a lubricating agent which lubricates contacting parts of objects in an EHL state is provided with: an optically transparent base plate; a contacting piece which is in contact with the base plate with the lubricating agent therebetween; a movement mechanism which causes the base plate and the contacting piece to move relative to one another; a load imparting mechanism; a light source; an interference color image-capturing unit; and a computer; wherein the computer is provided with, an image recording unit which records interference color images captured by the interference color image-capturing unit, and a film thickness distribution estimating unit which, from the color information of each point contained in selected interference color images from among the interference color images recorded in the image recording unit, performs color separation to obtain light of at least three wavelengths and calculates the brightness values thereof, calculates the phase of each wavelength, and calculates a plurality of film thickness candidates, and which estimates the film thickness distribution of the lubricating agent at the contacting part between the base plate and the contacting piece from the calculated plurality of film thickness candidates.