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1. (WO2017033546) PURGE DEVICE, PURGE STOCKER, AND PURGE METHOD

Pub. No.:    WO/2017/033546    International Application No.:    PCT/JP2016/068267
Publication Date: Fri Mar 03 00:59:59 CET 2017 International Filing Date: Tue Jun 21 01:59:59 CEST 2016
IPC: H01L 21/673
B65G 1/00
Applicants: MURATA MACHINERY, LTD.
村田機械株式会社
Inventors: MURATA, Masanao
村田 正直
YAMAJI, Takashi
山路 孝
Title: PURGE DEVICE, PURGE STOCKER, AND PURGE METHOD
Abstract:
[Problem] To provide a purge device capable of suitably performing purging in accordance with the type of a container. [Solution] A purge device (4A) is provided with: a type detection unit (41) that detects the type of a container (F) to be purged; and a purge control unit (42) that determines purge conditions with respect to the container on the basis of detection results obtained from the type detection unit.