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|1. (WO2017033527) HARD COATING FILM AND TARGET FOR FORMING HARD COATING FILM|
|Applicants:||YUKEN INDUSTRY CO., LTD.
|Title:||HARD COATING FILM AND TARGET FOR FORMING HARD COATING FILM|
Provided are: a hard coating film having excellent thermal oxidation resistance; and a hard coating film that serves as a target for forming the above-described hard coating film and has the following composition. (AlaCrbSccMd)(C1-e-fNeOf) In this connection, a represents the atomic ratio of Al; b represents the atomic ratio of Cr; c represents the atomic ratio of Sc; d represents the atomic ratio of an arbitrary element M; e represents the atomic ratio of N; f represents the atomic ratio of O; a, b, c, d, e and f satisfy 0.60 < a < 0.90, 0.0 < b < 0.40, 0.0 < c < 0.40, 0.0 ≤ d < 0.20, a + b + c + d = 1.0, 0.0 ≤ e ≤ 1.0, 0.0 ≤ f ≤ 1.0 and 0.0 ≤ e + f ≤ 1.0; and the arbitrary element M is composed of one or more elements selected from the group consisting of Y, B, Si, V, W, Hf, Zr, Nb, Ta, Mo, Ce and Ge.