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1. (WO2017033185) NANOPOROUS METAL-BASED FILM SUPPORTED ON AEROGEL SUBSTRATE AND METHODS FOR THE PREPARATION THEREOF
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Pub. No.: WO/2017/033185 International Application No.: PCT/IL2016/050915
Publication Date: 02.03.2017 International Filing Date: 22.08.2016
IPC:
C04B 35/624 (2006.01) ,B01J 13/00 (2006.01) ,C01B 33/14 (2006.01) ,C23C 14/02 (2006.01) ,C23C 14/08 (2006.01) ,C23C 14/18 (2006.01) ,B32B 15/04 (2006.01) ,B82B 1/00 (2006.01)
[IPC code unknown for C04B 35/624][IPC code unknown for B01J 13][IPC code unknown for C01B 33/14][IPC code unknown for C23C 14/02][IPC code unknown for C23C 14/08][IPC code unknown for C23C 14/18][IPC code unknown for B32B 15/04][IPC code unknown for B82B 1]
Applicants:
BAR-ILAN UNIVERSITY [IL/IL]; 5290002 Ramat Gan, IL
Inventors:
SALOMON, Adi; IL
RON, Racheli; IL
Agent:
WEBB, Cynthia; WEBB & CO. P.O. Box 2189 7612101 Rehovot, IL
WEBB, Cynthia; IL
FISHER, Michal; IL
BARZAM, Maty; IL
BOGIN, Liora; IL
BURSTEIN, Tal; IL
FINAROV, Igal; IL
FRIEDMAN, Nathalie; IL
GANOR, Sharon; IL
HORNIK, Vered; IL
MILLER, Keren; IL
NOAH, Eran; IL
RECHAV, Betsalel; IL
SCHICKLER, Hedva; IL
SCHVARTZ, Iris; IL
SILVERMAN, Eran; IL
TRAVITSKY, Nina; IL
WEBB, Yael; IL
ZIPOR, Gadi; IL
Priority Data:
62/208,84624.08.2015US
Title (EN) NANOPOROUS METAL-BASED FILM SUPPORTED ON AEROGEL SUBSTRATE AND METHODS FOR THE PREPARATION THEREOF
(FR) FILM À BASE DE MÉTAL NANOPOREUX SOUTENU PAR UN SUBSTRAT D'AÉROGEL ET PROCÉDÉS DE PRÉPARATION ASSOCIÉS
Abstract:
(EN) A method for the fabrication of a nanoporous metal -based film, the method comprising the steps of providing a ceramic aerogel substrate having a nanoporous structure, wherein the substrate comprises a bulk portion and a surface portion and wherein the surface portion is chemically or physically modified; and depositing a metal or a metal oxide from a deposition source on the ceramic aerogel substrate by a physical vapor deposition (PVD) process, wherein the deposition is performed at a power of less than about 90W or at a current ranging from about 0.5 mA to about 100 mA. Further provided is a nanoporous metal -based film supported on a ceramic aerogel substrate having a nanoporous 10 structure, wherein the nanoporous structure of the aerogel defines the nanoporous structure of the metal-based film.
(FR) L'invention concerne la fabrication d'un film à base de métal nanoporeux. Le procédé selon l'invention consiste à obtenir un substrat d'aérogel céramique doté d'une structure nanoporeuse, le substrat comprenant une partie en vrac et une partie de surface, la partie de surface étant modifée chimiquement ou physiquement ; et à déposer un métal ou un oxyde métallique à partir d'une source de dépôt sur le substrat d'aérogel céramique par procédé de dépôt physique en phase vapeur (PVD), le dépôt étant effectué à une puissance inférieure à environ 90W ou à un courant compris entre environ 0,5 mA et environ 100 mA. L'invention concerne en outre un film à base de métal nanoporeux soutenu par un substrat d'aérogel céramique doté d'une structure nanoporeuse 10, la structure nanoporeuse de l'aérogel définissant la structure nanoporeuse du film à base de métal.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Licensing availability request The applicant has requested the International Bureau to indicate the availability for licensing purposes of the invention(s) claimed in this international application